J. Mech. Des.. 137(1), 012301 (2015); doi:10.1115/1.4028791
However, flexures are characterized by some disadvantages, such as limited capability in terms of motion and force transmission, deformations highly dependent on the applied loads, limited resistance to yielding, variable position of the center of relative rotation.
In this paper, a new flexure hinge is introduced, with the aim of overcoming some of such limitations. The Conjugate Surfaces Flexure Hinge (CSFH) combines a curved beam, as flexible element, and a pair of conjugate surfaces, whose contact depends upon the load conditions. The contact between the conjugate surfaces can reduce the stress in the curved beam and limit the variations of the position of the relative rotations center.
This paper discloses how to simulate (both theoretically and with finite element analysis), construct (by means of a single step lithography and Reactive–Ion Etching, RIE), process and test (by means of in-SEM observation and manipulation) a new concept silicon CSFH prototype.